Details

Autor(en) / Beteiligte

• Wang, Shenghao
• Zhang, Jingquan
• Wang, Bo
• Feng, Lianghuan
• Cai, Yaping
• Wu, Lili
• Li, Wei
• Lei, Zhi
• Li, Bing

Titel

The effect of post-annealing under CdCl^sub 2^ atmosphere on the properties of ITO thin films deposited by DC magnetron sputtering

Ist Teil von

• Journal of materials science. Materials in electronics, 2010-05, Vol.21 (5), p.441

Ort / Verlag

New York: Springer Nature B.V

Erscheinungsjahr

2010

Link zum Volltext

Quelle

SpringerLink (Online service)

Beschreibungen/Notizen

• Indium tin oxide (ITO) films deposited by DC magnetron sputtering were annealed under CdCl^sub 2^ atmosphere at different temperatures. The effects of CdCl^sub 2^ heat-treatment on the structural, electrical and optical properties of the films were investigated. The X-ray diffraction measurement proves the annealing results in a change of preferred orientation from (400) to (222). It is found the resistivity increases from 1.49 × 10^sup -4^ Ω cm of the as-deposited film to 6.82 × 10^sup -4^ Ω cm of the film annealed at 420 °C. The optical energy gap for the film varies from 3.97 to 3.89 eV. It is also found that the CdCl^sub 2^ heat-treatment results in narrowing the energy gap of ITO film.[PUBLICATION ABSTRACT]