Details

Autor(en) / Beteiligte

• Prokopenko, N. A.
• Ivanov, Yu. F.
• Koval, N. N.
• Krysina, O. V.
• Petrikova, E. A.
• Tolkachev, O. S.
• Shugurov, V. V.
• Akhmadeev, Yu. Kh
• Uglov, V. V.
• Shmakov, A. N.

Titel

Plasma-Assisted Vacuum Arc Deposition of Multilayer Ceramic High-Entropy Alloy Films and Their Study with Synchrotron Radiation

Ist Teil von

• Surface investigation, x-ray, synchrotron and neutron techniques, 2023-12, Vol.17 (Suppl 1), p.S28-S34

Ort / Verlag

Moscow: Pleiades Publishing

Erscheinungsjahr

2023

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• The results of studies aimed at synthesizing coatings of ceramic high-entropy alloys by the vacuum-arc plasma-assisted method with simultaneous evaporation of several cathodes are presented. The optimal regimes for deposition a nitride coating of the (NbMoCrTiAl)N composition were revealed. To determine the contribution of the ion current of each arc evaporator, the azimuthal characteristics of the ion current density of the arc evaporators and the PINK-P gas plasma generator were measured. It is shown that the formed coating had a non-equiatomic composition, and the concentration of metal atoms in the coating varied from 6.6 at % up to 13.9 at %. It was established that the coating was multilayer with a layer thickness of (23–27) nm. Layers enriched in titanium atoms, alternating with layers enriched in chromium, molybdenum, and niobium atoms, were revealed. It was suggested that one of the reasons for the observed layering of the coating in terms of elemental composition was the difference in the types of crystal lattices of those elements. X-ray phase analysis was performed using synchrotron radiation, and the results of transmission electron microscopy showed that the synthesized coating had a columnar nanocrystalline structure. The transverse size of the columns varied from 20 to 170 nm, and the longitudinal size varied from 115 to 700 nm. The average crystallite size was 2.5–6 nm. The hardness of the resulting coating was 43 GPa, the friction coefficient was 0.5, and the wear parameter (a value inversely proportional to wear resistance) was 7 × 10 –6 mm 3 N –1 m –1 .