Details

Autor(en) / Beteiligte

• Schwartz, M.
• Kodati, S. H.
• Lee, S.
• Jung, H.
• Chen, D.
• Grein, C. H.
• Ronningen, T. J.
• Campbell, J. C.
• Krishna, S.

Titel

Determination of the background doping polarity for unintentionally doped AlGaAsSb and AlInAsSb avalanche photodiodes on InP substrates

Ist Teil von

• AIP advances, 2022-09, Vol.12 (9), p.095222-095222-7

Ort / Verlag

Melville: American Institute of Physics

Erscheinungsjahr

2022

Quelle

EZB Electronic Journals Library

Beschreibungen/Notizen

• Background doping polarity is a critical design parameter for the performance of many optoelectronic devices, including avalanche photodiodes. We have applied a technique by using capacitance–voltage (CV) measurements on double mesa structures with a p-i-n or n-i-p homojunction to determine the background polarity type of the unintentionally doped intrinsic region. Because CV measurements scale with the size of the mesa, they support design flexibility in producing variable-sized top and bottom mesa diameters. In this work, we grew, fabricated, and tested AlGaAsSb and AlInAsSb random alloy double mesa p-i-n structures and undertook CV measurements at 295, 150, and 77 K. It was found that the capacitance varied with the top mesa diameter for both material systems, and not the bottom mesa diameter, indicating that the unintentionally doped intrinsic region is n-type in nature.