Details

Autor(en) / Beteiligte

• Polyakov, D.S.
• Veiko, V.P.
• Salnikov, N.M.
• Shimko, A.A.
• Mikhaylova, A.A.

Titel

Formation of microconical structures on Si surface under the action of pulsed periodic Yb-fiber laser radiation

Ist Teil von

• Journal of physics. Conference series, 2018-01, Vol.951 (1), p.12012

Ort / Verlag

Bristol: IOP Publishing

Erscheinungsjahr

2018

Quelle

EZB Electronic Journals Library

Beschreibungen/Notizen

• In this paper the results of microstructuring of monocrystalline silicon by series of nanosecond Yb-fiber laser pulses are presented. It is shown that nanosecond Yb-fiber laser can be successfully applied for creation of microrelief consisting of microcones arrays. Obtained relief provides a reduction of the reflection coefficient below 10% in visible range of the spectrum. It is also established that for creation of microconical relief by nanosecond Yb-fiber laser it is advisable to use "short" nanosecond pulses with pulse durations from several nanoseconds to several tens of nanoseconds.