Details

Autor(en) / Beteiligte

• Goncharov, V D
• Yashkardin, R V

Titel

The experimental study of spacial distribution of particles produced in the pulse arc discharge

Ist Teil von

• IOP conference series. Materials Science and Engineering, 2018-07, Vol.387 (1), p.12021

Ort / Verlag

Bristol: IOP Publishing

Erscheinungsjahr

2018

Quelle

EZB Electronic Journals Library

Beschreibungen/Notizen

• The results of experimental researches of special particle psuttering produced due to the energy impact of the pulse discharge plasma moving along the surface of the extended electrodes. The particles distribution study of the substrates placed at the different areas regarding the dis-charge was carried out using scanning probe microscope. It is shown that the major part of the produced particles had sizes from 50 to 500 nm and sputtered orthogonally to the surface of the electrodes and discharge motion vector.