Details

Autor(en) / Beteiligte

• Yoo, Dagyum
• Han, Seong Ho
• Lee, Sung Kwang
• Eom, Taeyong
• Park, Bo Keun
• Kim, Chang Gyoun
• Son, Seung Uk
• Chung, Taek‐Mo

Titel

Synthesis of New Heteroleptic Indium Complexes as Potential Precursors for Indium Oxide Thin Films

Ist Teil von

• European journal of inorganic chemistry, 2021-07, Vol.2021 (25), p.2480-2485

Ort / Verlag

Weinheim: Wiley Subscription Services, Inc

Erscheinungsjahr

2021

Link zum Volltext

Quelle

Wiley-Blackwell Journals

Beschreibungen/Notizen

• New heteroleptic indium complexes, i. e., [MeIn(mdpa)(tmhd)]2 (2), [MeIn(mdpa)(acac)]2 (3), [MeIn(edpa)(tmhd)]2 (4), and [MeIn(edpa)(acac)]2 (5), with three different ligands, bearing N‐alkoxy carboxamide and β‐diketonate were designed and synthesized as indium precursors for indium oxide thin films by atomic layer deposition (ALD) using [Me2In(edpa)]2 and [Me2In(mdpa)]2 (1) as starting materials. The resulting complexes were characterized by NMR and FT‐IR spectroscopy, elemental analysis (EA), thermogravimetric analysis (TGA), and single crystal X‐ray diffraction. TGA curves of all the complexes showed clear single‐step weight losses, with low residual masses of 7–13 %. Among them, complex 5 was volatile and thermally stable, and thus, it can be used as potential indium precursor for indium oxide‐based thin films. New heteroleptic indium complexes that include three different ligands, methyl, N‐alkoxy carboxamide, and β‐diketonate, have been designed and successfully synthesized for use in the preparation of In2O3‐based thin films.