Details

Autor(en) / Beteiligte

• Huang, Lei
• Zhang, Jiuxing
• Pan, Yafei
• Du, Yong

Titel

Spark plasma sintering of W-10Ti high-purity sputtering target: Densification mechanism and microstructure evolution

Ist Teil von

• International journal of refractory metals & hard materials, 2020-11, Vol.92, p.105313, Article 105313

Ort / Verlag

Shrewsbury: Elsevier Ltd

Erscheinungsjahr

2020

Link zum Volltext

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• The densification mechanism and microstructure evolution of W-10Ti sputtering target prepared by spark plasma sintering (SPS) method at a temperature ranges from 900 to 1600 °C, with dwelling time of 6 min and fixed pressure of 30 MPa were investigated. Densification occurs mainly at low temperatures (900 to 1300 °C), while grain growth occurs at high temperatures (1400 to 1600 °C). The creep model has been used to reveal the densification process. The effective stress exponent n is calculated systematically, which indicates that the densification process is mainly due to the particle rearrangement (n < 1), grain boundary diffusion (n = 1–2), and dislocation climbing (n = 3.77 or 4.14). In addition, the apparent activation energy Qd is calculated to be 119.30 and 271.79 kJ/mol when the effective stress exponent n is equal to 1 and 2, respectively. It is also found that the microstructure of W-10Ti alloys is greatly affected by the sintering temperatures. The solution between W and Ti significantly improves with the increase of the sintering temperature. The solubility of W in βTi(W) exceeded the eutectoid point (28.97 wt% W) and the eutectoid structure (βW(Ti) + αTi) forms in cooling process when the temperature is up to 1300 °C. With the temperature increasing to 1500 °C, the composition of the βTi(W) phase is located in the miscibility gap of the (βTi(W), βW(Ti)) system, which tends to decompose in to βTi(W) and βW(Ti) phases. •The W-10Ti high-purity sputtering target was prepared by SPS.•The densification mechanism of W-10Ti alloys was investigated.•The microstructure evolution of W-10Ti alloys was studied.