Details

Autor(en) / Beteiligte

• Ruth, Sara Rachel Arussy
• Beker, Levent
• Tran, Helen
• Feig, Vivian Rachel
• Matsuhisa, Naoji
• Bao, Zhenan

Titel

Rational Design of Capacitive Pressure Sensors Based on Pyramidal Microstructures for Specialized Monitoring of Biosignals

Ist Teil von

• Advanced functional materials, 2020-07, Vol.30 (29), p.n/a

Ort / Verlag

Hoboken: Wiley Subscription Services, Inc

Erscheinungsjahr

2020

Link zum Volltext

Quelle

Wiley Online Library

Beschreibungen/Notizen

• There is an increasing demand for specialized pressure sensors in various applications. Previously, capacitive pressure sensors have been shown to have wide versatility in use, with a high degree of potential tuning possible through manipulating the geometry or material selection of the dielectric layer. However, in order to make sensors that are tunable and predictable, the design and fabrication method first needs to be developed. Presented here is an improved fabrication method to achieve tunable, consistent, and reproducible pressure sensors by using a pyramid microstructured dielectric layer along with a lamination layer. The as‐produced sensor performance is able to match predicted trends. Further, a simple model based on this system is developed and its efficacy is experimentally confirmed. Then, the model to predict a wide range of material and microstructure geometric properties prior to device fabrication is used to provide trends on sensor performance. Finally, it is demonstrated that the new method can be used to targetedly design a pressure sensor for a specific application—in vitro pulse sensing. Tunable pressure sensors are achievable by geometric manipulation or material selection. To achieve this, tunable and reproducible pressure sensors are fabricated and modeled using a simple model based on microstructure properties. The model can be used to predict the effects of a wide range of material properties on sensor performance. Using this, targeted sensors for specific applications can be achieved.