Details

Autor(en) / Beteiligte

• Notaros, Jelena
• Watts, Michael R.
• Li, Nanxi
• Poulton, Christopher V.
• Su, Zhan
• Byrd, Matthew J.
• Magden, Emir Salih
• Timurdogan, Erman
• Baiocco, Christopher
• Fahrenkopf, Nicholas M.

Titel

CMOS-Compatible Optical Phased Array Powered by a Monolithically-Integrated Erbium Laser

Ist Teil von

• Journal of lightwave technology, 2019-12, Vol.37 (24), p.5982-5987

Ort / Verlag

New York: IEEE

Erscheinungsjahr

2019

Link zum Volltext

• IEEE_Xplore

Quelle

IEEE Electronic Library (IEL)

Beschreibungen/Notizen

• An advanced CMOS-compatible 300-mm-wafer silicon-photonics platform is introduced that consists of a silicon layer with eight doping masks, two silicon-nitride layers, three metal and via layers, a dicing trench for smooth edge-coupled facets, and a gain-film trench that enables interaction between the gain material and waveguide layers. The platform was used to demonstrate an electrically-steerable integrated optical phased array powered by an on-chip erbium-doped laser. Lasing with a single-mode output, 30 dB side-mode-suppression ratio, and 40 mW lasing threshold was shown, and one-dimensional beam steering with a 0.85° × 0.20° full-width at half-maximum and 30°/W electrical steering efficiency was demonstrated. This system represents the first demonstration of a rare-earth-doped laser monolithically-integrated with an active CMOS-compatible silicon-on-insulator photonics system.