Tribology letters, 2005-01, Vol.18 (1), p.13-19
2005
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Details
- Autor(en) / Beteiligte
- Titel
- A novel MEMS nano-tribometer for dynamic testing in-situ in SEM and TEM
- Ist Teil von
- Tribology letters, 2005-01, Vol.18 (1), p.13-19
- Ort / Verlag
- Dordrecht: Springer Nature B.V
- Erscheinungsjahr
- 2005
- Quelle
- SpringerLink
- Beschreibungen/Notizen
- We present the design and fabrication of a micro-electro-mechanical (MEMS) tribometer with normal and lateral force resolutions of 100 and 1 nano-Newton, respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 1023-8883eISSN: 1573-2711DOI: 10.1007/s11249-004-1700-zTitel-ID: cdi_proquest_journals_2281371266
- Format
- –
- Schlagworte
- Dynamic tests, Electron microscopes, Microelectromechanical systems, Microscopes, Tribology