Details

Autor(en) / Beteiligte

• Wu, Zhao-zhi
• Luo, Feng
• Guo, Deng-ji
• Wu, Xiao-yu
• Xu, Bin
• Lei, Jian-guo
• Liang, Xiong
• Diao, Dong-feng

Titel

Micro-EDM by using laminated 3D microelectrodes with deionized water containing B4C powder

Ist Teil von

• International journal of advanced manufacturing technology, 2018-12, Vol.99 (9-12), p.2893-2902

Ort / Verlag

London: Springer London

Erscheinungsjahr

2018

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• The applicability of micro-electrical discharge machining (micro-EDM) using laminated 3D microelectrodes to eliminate defects such as numerous micro-stripes that are prone to appear on the sidewalls of microstructures manufactured via micro-electrochemical machining (micro-ECM) was examined. The study proposes the fabrication of 3D microstructures with laminated 3D microelectrodes through micro-EDM with deionized water containing B 4 C powder having a particle size of 1 μm. First, the effect of different machining voltages, B 4 C concentrations, and microelectrode back-off distances on the unilateral gap was investigated. The results indicated that a machining voltage of 100 V, a B 4 C concentration of 3 g/L, and a microelectrode back-off distance of 200 μm resulted in a 69 μm unilateral gap of the 3D microstructures. Given the effect of micro-EDM and that B 4 C is a semiconductor, the plasma discharge channels were enlarged, and the material removal was uniform. This significantly improved the machining efficiency. Furthermore, the polishing of B 4 C on electrode surfaces and workpiece surfaces smoothly removed the processing attachments with dielectric and ensured efficient and stable machining. Based on the optimized process parameters and after 1.5 h, 3D microstructures with a depth of 800 μm with a square-shaped blind hole and with semicircular and rectangular islands were obtained, and the corresponding roughness ( R a ) of the bottom surface was 0.389, 0.388, and 0.392 μm. However, the corresponding microelectrodes wear was low and approximately corresponded to 20, 15, and 15 μm.