Journal of Photopolymer Science and Technology, 2017/12/20, Vol.30(6), pp.645-649
2017
Details
- Autor(en) / Beteiligte
- Titel
- Novel Acid Amplifier Generating Disulfonimide as Superacid
- Ist Teil von
- Journal of Photopolymer Science and Technology, 2017/12/20, Vol.30(6), pp.645-649
- Ort / Verlag
- Hiratsuka: The Society of Photopolymer Science and Technology(SPST)
- Erscheinungsjahr
- 2017
- Link zum Volltext
- Quelle
- EZB Free E-Journals
- Beschreibungen/Notizen
- Disulfonimide acid amplifier which produces superacid was newly designed and synthesized. This compound exhibited high acid generation efficiency and thermal stability on a polymer film. Further, this compound enhanced the sensitivity in the positive chemically amplified photoresist system.
- Sprache
- Englisch; Japanisch
- Identifikatoren
- ISSN: 0914-9244eISSN: 1349-6336DOI: 10.2494/photopolymer.30.645Titel-ID: cdi_proquest_journals_2232596487
- Format
- –
- Schlagworte
- Acid amplifier, Amplifiers, Disulfonimide, Organic chemistry, Photoresist, Photoresists, Polymer films, Sensitivity enhancement, Superacid, Thermal stability