Details

Autor(en) / Beteiligte

• Hameiri, Ziv
• Rougieux, Fiacre
• Sinton, Ron
• Trupke, Thorsten

Titel

Contactless determination of the carrier mobility sum in silicon wafers using combined photoluminescence and photoconductance measurements

Ist Teil von

• Applied physics letters, 2014-02, Vol.104 (7)

Ort / Verlag

Melville: American Institute of Physics

Erscheinungsjahr

2014

Quelle

American Institute of Physics (AIP) Journals

Beschreibungen/Notizen

• A contactless method to determine the carrier mobility sum in silicon wafers, based on a comparison between photoluminescence and photoconductance measurements is presented. The method is applied to monocrystalline silicon wafers and the results are found to be in good agreement with well-established mobility models and another measurement method. The potential of the proposed method to determine the carrier mobility sum of multicrystalline and compensated silicon wafers is then demonstrated.