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Tests of the modified Sigmund model of ion sputtering using Monte Carlo simulations
Ist Teil von
Journal of applied physics, 2015-05, Vol.117 (17)
Ort / Verlag
Melville: American Institute of Physics
Erscheinungsjahr
2015
Link zum Volltext
Quelle
American Institute of Physics (AIP) Journals
Beschreibungen/Notizen
Monte Carlo simulations are used to evaluate the Modified Sigmund Model of Sputtering. Simulations were carried out for a range of ion incidence angles and surface curvatures for different ion species, ion energies, and target materials. Sputter yields, moments of erosive crater functions, and the fraction of backscattered energy were determined. In accordance with the Modified Sigmund Model of Sputtering, we find that for sufficiently large incidence angles θ the curvature dependence of the erosion crater function tends to destabilize the solid surface along the projected direction of the incident ions. For the perpendicular direction, however, the curvature dependence always leads to a stabilizing contribution. The simulation results also show that, for larger values of θ, a significant fraction of the ions is backscattered, carrying off a substantial amount of the incident ion energy. This provides support for the basic idea behind the Modified Sigmund Model of Sputtering: that the incidence angle θ should be replaced by a larger angle Ψ to account for the reduced energy that is deposited in the solid for larger values of θ.