Details

Autor(en) / Beteiligte

• Weckman, Nicole E.
• Seshia, Ashwin A.

Titel

Reducing dissipation in piezoelectric flexural microplate resonators in liquid environments

Ist Teil von

• Sensors and actuators. A. Physical., 2017-11, Vol.267, p.464-473

Ort / Verlag

Lausanne: Elsevier B.V

Erscheinungsjahr

2017

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• •Methods to reduce acoustic radiation from microplate resonators are discussed.•Analytical and finite element models of flexural microplate resonators are developed.•Models are compared to electrical and optical measurements with good agreement.•Microplate flexural mode with increased Q from air to water is presented. While piezoelectric microplates are emerging as a promising MEMS liquid-based sensing platform, often acoustic radiation losses limit device performance. This paper presents a new analysis of microplate acoustic radiation losses through the use of traditional analytical models for the fundamental mode and a new finite element model that is used to analyze trends affecting Q for both the fundamental and higher order flexural modes. Results from these models are compared with experimental measurements of frequency and Q measured using both electrical characterization and the laser Doppler vibrometer for multiple modes of the microplate in water as compared to air and vacuum. Finally, a microplate mode with a high initial Q of around 150 in air and that demonstrates an increase in Q going from air to water is presented as a strong candidate for use in droplet based sensing applications.