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Fluorine doped diamond-like carbon (F-DLC) coatings were deposited on Ti-6Al-4V alloy using a hollow cathode plasma immersion ion implantation deposition system. The aim of this work is to investigate the influence of F content on the surface morphology, structure, mechanical and tribological properties (under air and stroke-physiological saline solution) of the F-DLC coatings. The results reveal that the ratio of H/fE instead of H/E can be well predicting the anti-wear results when the F-DLC coatings have enough adhesion strength, where H is hardness, E is Young's modulus and f is friction coefficient. The F-DLC coatings with high F content exhibit excellent tribological property under air. The low F content F-DLC coatings present super-low friction coefficient and wear rate in stroke-physiological saline solution. Reasons for the tribological property are proposed in combination with the films' morphology and mechanical property.
•F doped DLC coatings were deposited on Ti-6Al-4V alloy using a HCPIII method.•The ratio of H/fE can be well predicting the F-DLC coatings' anti-wear results.•The low F content F-DLC coatings present excellent tribological properties in SPSS.