Details

Autor(en) / Beteiligte

• Lalev, G
• Dimov, S
• Kettle, J
• van Delft, F
• Minev, R

Titel

Data preparation for focused ion beam machining of complex three-dimensional structures

Ist Teil von

• Proceedings of the Institution of Mechanical Engineers. Part B, Journal of engineering manufacture, 2008-01, Vol.222 (1), p.67-76

Ort / Verlag

London, England: SAGE Publications

Erscheinungsjahr

2008

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• The realization of complex three-dimensional structures at micro- and nanometre scale in various materials is of great importance for a number of micromechanical, microoptical, and microelectronic applications. Focused ion beam (FIB) patterning is one of the promising technologies for producing such three-dimensional structures utilizing layer-by-layer fabrication methods. A novel and efficient data preparation approach is proposed in this paper for layer-based FIB processing. By applying it, complex surfaces can be designed easily in any three-dimensional computer-aided design (CAD) package and then converted into GDSII streams for FIB sputtering or deposition. To validate the proposed CAD/CAM approach an experimental study was conducted. The factors that can affect the accuracy of the structures produced by layer-based FIB processing are also discussed. By assessing all stages of the proposed approach and the results of its experimental validation, conclusions are drawn about its applicability.