Details

Autor(en) / Beteiligte

• Kato, Hirokazu
• Seino, Yuriko
• Yonemitsu, Hiroki
• Sato, Hironobu
• Kanno, Masahiro
• Kobayashi, Katsutoshi
• Kawanishi, Ayako
• Imamura, Tsubasa
• Omura, Mitsuhiro
• Nakamura, Naofumi
• Azuma, Tsukasa

Titel

The Photopolymer Science and Technology Award

Ist Teil von

• Journal of Photopolymer Science and Technology, 2014/07/08, Vol.27(1), pp.7-10

Ort / Verlag

Hiratsuka: The Society of Photopolymer Science and Technology(SPST)

Erscheinungsjahr

2014

Quelle

Free E-Journal (出版社公開部分のみ）

Beschreibungen/Notizen

• The Photopolymer Science and Technology Award No. 142100, the Best Paper Award 2014, was presented to Kato, Hirokazu, Seino, Yuriko, Yonemitsu, Hiroki, Sato, Hironobu, Kanno, Masahiro, Kobayashi, Katsutoshi, Kawanishi, Ayako, Imamura, Tsubasa, Omura, Mitsuhiro, Nakamura, Naofumi, Azuma, Tsukasa (Toshiba Corporation) for their outstanding contribution published in the Journal of Photopolymer Science and Technology, 26, (2013) 21-26, entitled “Electrical Via Chain Yield for DSA Contact Hole Shrink Process”.