Details

Autor(en) / Beteiligte

• Bulmer, Kristopher

Titel

Conception, assemblage, étalonnage et automatisation d'un ellipsomètre réflexion-transmission pour la gamme visible-infrarouge

Ort / Verlag

ProQuest Dissertations & Theses

Erscheinungsjahr

2013

Quelle

ProQuest Dissertations & Theses A&I

Beschreibungen/Notizen

• This work describes the design, assembly, calibration and automation of an ellipsometer developed here at Université de Moncton, as well as the study the precision and accuracy of some results obtained via said system. The primary usage of our instrument is the measurement of the six primary photo-ellipsometric quantities of a sample, as a function of wavelength (from 375 to 2200 nm) and angle of incidence (from 10° to 70°). The term sample, in our context is defined as a stack of planar layers with supposedly parallel faces. Each layer is characterised by a refractive index and a thickness. Once the measurement of the experimental quantities is complete, unknown refractive indexes and thicknesses can be determined from the experimental data. The typical case is the determination of the refractive index and thickness of a single layer deposited on a glass substrate, itself of known thickness and refractive index. Contrary to the majority of commercial ellipsometers, which use only the reflected light, our system can measure the reflection and/or transmission (simultaneously). The inclusion of the transmission increases the sensitivity of our system to the imaginary part of the refractive index. The seventh chapter of this work provides several varying examples of sample