Details

Autor(en) / Beteiligte

• Ko, Po-Jen
• Wang, Yen-Po
• Tien, Szu-Chi

Titel

Inverse-feedforward and robust-feedback control for high-speed operation on piezo-stages

Ist Teil von

• International journal of control, 2013-02, Vol.86 (2), p.197-209

Ort / Verlag

Abingdon: Taylor & Francis Group

Erscheinungsjahr

2013

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• This article demonstrates an approach to compensate for tracking errors resulting from hysteresis and vibration when operating piezo-stages and to achieve precision motion control on them. In order to achieve this goal, inverse-feedforward control and H ∞ -feedback control were utilised to augment each other. Experimental results showed that pure feedforward control would suffer from modelling uncertainty and pure feedback control would be limited on its bandwidth; therefore, both of these could compensate for partial tracking errors. In contrast, the proposed approach integrated the merits of feedforward and feedback controls to improve the tracking performance when operating piezo-stages in long-stroke and high-speed.