Microelectronic engineering, 1999, Vol.46 (1-4)
1999
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Details
- Autor(en) / Beteiligte
- Titel
- Micro- and Nano- Engineering 98, MNE. Proceedings of the International Conference on Micro- and Nanofabrication, September 22-24 1998, Leuven, Belgium
- Ist Teil von
- Microelectronic engineering, 1999, Vol.46 (1-4)
- Ort / Verlag
- Amsterdam: Elsevier Science
- Erscheinungsjahr
- 1999
- Quelle
- Elsevier Journal Backfiles on ScienceDirect (DFG Nationallizenzen)
- Sprache
- Englisch
- Identifikatoren
- ISSN: 0167-9317eISSN: 1873-5568Titel-ID: cdi_pascalfrancis_primary_358079
- Format
- –
- Schlagworte
- Applied sciences, Electronics, Exact sciences and technology, Integrated circuits, Integrated circuits by function (including memories and processors), Microelectronic fabrication (materials and surfaces technology), Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices