Details

Autor(en) / Beteiligte

• Viala, B.
• Couderc, S.
• Royet, A.S.
• Ancey, P.
• Bouche, G.

Titel

Bidirectional ferromagnetic spiral inductors using single deposition

Ist Teil von

• IEEE transactions on magnetics, 2005-10, Vol.41 (10), p.3544-3549

Ort / Verlag

New York, NY: IEEE

Erscheinungsjahr

2005

Quelle

IEEE/IET Electronic Library (IEL)

Beschreibungen/Notizen

• Size reduction for spiral inductors is investigated. We reveal bidirectional ferromagnetic inductors with an /spl sim/30% to 135% increase in L over the air-core value. This is advantageously realized by using single deposition. The realization uses above-IC techniques and high-magnetization FeHfN laminated films. We also report a quality factor of /spl sim/10 at 1.5 GHz, which is mitigated while realizing high FMR frequency (up to 6 GHz). This leads to considerations on nonmagnetic excess losses. Finally, a surface reduction of 25% to 50% for conventional spirals is demonstrated.