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Direct wafer bonding technology for large-scale InGaAs-on-insulator transistors
Ist Teil von
Applied physics letters, 2014-07, Vol.105 (4)
Ort / Verlag
Melville: American Institute of Physics
Erscheinungsjahr
2014
Link zum Volltext
Quelle
AIP Journals Complete
Beschreibungen/Notizen
Heterogeneous integration of III-V devices on Si wafers have been explored for realizing high device performance as well as merging electrical and photonic applications on the Si platform. Existing methodologies have unavoidable drawbacks such as inferior device quality or high cost in comparison with the current Si-based technology. In this paper, we present InGaAs-on-insulator (-OI) fabrication from an InGaAs layer grown on a Si donor wafer with a III-V buffer layer instead of growth on a InP donor wafer. This technology allows us to yield large wafer size scalability of III-V-OI layers up to the Si wafer size of 300 mm with a high film quality and low cost. The high film quality has been confirmed by Raman and photoluminescence spectra. In addition, the fabricated InGaAs-OI transistors exhibit the high electron mobility of 1700 cm2/V s and uniform distribution of the leakage current, indicating high layer quality with low defect density.