Details

Autor(en) / Beteiligte

• Ticoş, C. M.
• Jepu, I.
• Lungu, C. P.
• Chiru, P.
• Zaroschi, V.
• Lungu, A. M.

Titel

Removal of floating dust in glow discharge using plasma jet

Ist Teil von

• Applied physics letters, 2010-07, Vol.97 (1), p.011501-011501-3

Ort / Verlag

United States: American Institute of Physics

Erscheinungsjahr

2010

Quelle

AIP Journals Complete

Beschreibungen/Notizen

• Dust can be an inconvenient source of impurities in plasma processing reactors and in many cases it can cause damage to the plasma-treated surfaces. A technique for dust expulsion out of the trapping region in plasma is presented here, based on the wind force exerted on dust particles by a pulsed plasma jet. Its applicability is demonstrated by removing floating dust in the sheath of parallel-plate capacitive radio-frequency plasma.