Details

Autor(en) / Beteiligte

• Park, Jaeyoung
• Henins, I.
• Herrmann, H. W.
• Selwyn, G. S.
• Jeong, J. Y.
• Hicks, R. F.
• Shim, D.
• Chang, C. S.

Titel

An atmospheric pressure plasma source

Ist Teil von

• Applied physics letters, 2000-01, Vol.76 (3), p.288-290

Ort / Verlag

United States

Erscheinungsjahr

2000

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• An atmospheric pressure plasma source operated by radio frequency power has been developed. This source produces a unique discharge that is volumetric and homogeneous at atmospheric pressure with a gas temperature below 300 °C. It also produces a large quantity of oxygen atoms, ∼5×1015 cm−3, which has important value for materials applications. A theoretical model shows electron densities of 0.2–2×1011 cm−3 and characteristic electron energies of 2–4 eV for helium discharges at a power level of 3–30 W cm−3.