Details

Autor(en) / Beteiligte

• Nishijima, D.
• Doerner, R.P.
• Hollmann, E.M.
• Miyamoto, M.

Titel

Laser-induced breakdown spectroscopy thickness measurements of films thinner than ablation rate

Ist Teil von

• Spectrochimica acta. Part B: Atomic spectroscopy, 2017-10, Vol.136 (C), p.34-38

Ort / Verlag

Oxford: Elsevier B.V

Erscheinungsjahr

2017

Link zum Volltext

Quelle

Elsevier ScienceDirect Journals Complete

Beschreibungen/Notizen

• A new laser-induced breakdown spectroscopy (LIBS) technique is proposed to measure the thickness of films thinner than the ablation rate. The film thickness dependence of the signal intensity is used as a calibration curve. It is demonstrated that calibration curves are successfully made for thin W films and (Fe, Cr, Ni) mixed-material films produced in a magnetron sputtering device. [Display omitted] •LIBS method is proposed to measure the thickness of films thinner than ablation rate.•The film thickness dependence of the signal intensity is used as a calibration curve.•Calibration curves are produced for films made of both single and multi elements.•The composition of multi-element films can be simultaneously derived.