Details

Autor(en) / Beteiligte

• Nishijima, D.
• Hollmann, E.M.
• Doerner, R.P.

Titel

Spatially-offset double-pulse laser-induced breakdown spectroscopy: A novel technique for analysis of thin deposited layers

Ist Teil von

• Spectrochimica acta. Part B: Atomic spectroscopy, 2016-10, Vol.124 (C), p.82-86

Ort / Verlag

United Kingdom: Elsevier B.V

Erscheinungsjahr

2016

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• A novel technique, spatially-offset double-pulse laser-induced breakdown spectroscopy (SODP-LIBS), is invented for analysis of thin layers. In this technique, two laser spots are spatially offset by a few mm, while there is no spatial gap for the standard collinear DP-LIBS. It is demonstrated from analysis of thin W layers (∼30–250nm thickness) deposited on Mo substrates at a reduced ambient pressure of ∼ 5×10−3 Torr that (1) the W I signal intensity is enhanced with SODP-LIBS and (2) a clearer transition between W and Mo is obtained with SODP-LIBS, compared to the standard DP-LIBS. •Spatially-offset double-pulse (SODP) LIBS is invented for analysis of thin layers.•A spatial offset by a few mm between two laser spots is the key in this technique.•It is demonstrated that SODP-LIBS is superior to the standard collinear DP-LIBS.