Details

Autor(en) / Beteiligte

• Huang, P.
• Lethien, C.
• Pinaud, S.
• Brousse, K.
• Laloo, R.
• Turq, V.
• Respaud, M.
• Demortière, A.
• Daffos, B.
• Taberna, P. L.
• Chaudret, B.
• Gogotsi, Y.
• Simon, P.

Titel

On-chip and freestanding elastic carbon films for micro-supercapacitors

Ist Teil von

• Science (American Association for the Advancement of Science), 2016-02, Vol.351 (6274), p.691-695

Ort / Verlag

United States: American Association for the Advancement of Science

Erscheinungsjahr

2016

Quelle

American Association for the Advancement of Science

Beschreibungen/Notizen

• Integration of electrochemical capacitors with silicon-based electronics is a major challenge, limiting energy storage on a chip. We describe a wafer-scale process for manufacturing strongly adhering carbide-derived carbon films and interdigitated micro-supercapacitors with embedded titanium carbide current collectors, fully compatible with current microfabrication and silicon-based device technology. Capacitance of those films reaches 410 farads per cubic centimeter/200 millifarads per square centimeter in aqueous electrolyte and 170 farads per cubic centimeter/85 millifarads per square centimeter in organic electrolyte. We also demonstrate preparation of self-supported, mechanically stable, micrometer-thick porous carbon films with a Young's modulus of 14.5 gigapascals, with the possibility of further transfer onto flexible substrates. These materials are interesting for applications in structural energy storage, tribology, and gas separation.