Details

Autor(en) / Beteiligte

• Iyer, Ganjigunte R. S
• Hobbie, Erik K
• Guruvenket, Srinivasan
• Hoey, Justin M
• Anderson, Kenneth J
• Lovaasen, John
• Gette, Cody
• Schulz, Douglas L
• Swenson, Orven F
• Elangovan, Arumugasamy
• Boudjouk, P

Titel

Solution-Based Synthesis of Crystalline Silicon from Liquid Silane through Laser and Chemical Annealing

Ist Teil von

• ACS applied materials & interfaces, 2012-05, Vol.4 (5), p.2680-2685

Ort / Verlag

United States: American Chemical Society

Erscheinungsjahr

2012

Quelle

Alma/SFX Local Collection

Beschreibungen/Notizen

• We report a solution process for the synthesis of crystalline silicon from the liquid silane precursor cyclohexasilane (Si6H12). Polysilane films were crystallized through thermal and laser annealing, with plasma hydrogenation at atmospheric pressure generating further structural changes in the films. The evolution from amorphous to microcrystalline is characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy and impedance spectroscopy. A four-decade enhancement in the electrical conductivity is attributed to a disorder–order transition in a bonded Si network. Our results demonstrate a potentially attractive approach that employs a solution process coupled with ambient postprocessing to produce crystalline silicon thin films.