Details

Autor(en) / Beteiligte

• Salort, J
• Monfardini, A
• Roche, P -E

Titel

Micro-Cantilever Anemometer for Cryogenic Helium

Ist Teil von

• Journal of physics. Conference series, 2011-12, Vol.318 (9), p.092030-3

Ort / Verlag

Bristol: IOP Publishing

Erscheinungsjahr

2011

Link zum Volltext

Quelle

EZB Electronic Journals Library

Beschreibungen/Notizen

• We present a new anemometer for liquid helium, based on a micro-cantilever. Our aim was to design a probe significatively smaller than one millimeter and that can be used both above and below the superfluid transition at Tλ 2.17K. This sensor, including its bearing arms, is fully micro-machined using "Deep Reactive Ion Etching" techniques on a silicon wafer. This lets us choose the geometry of the arms to make them as little invasive as possible. The deflection of the cantilever, which reflects the local fluid velocity, is probed using a niobium superconducting LC resonator, with a critical temperature Tc ≈ 9K.