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Optical emission spectroscopy in low-temperature plasmas containing argon and nitrogen: determination of the electron temperature and density by the line-ratio method
Ist Teil von
Journal of physics. D, Applied physics, 2010-10, Vol.43 (40), p.403001
Ort / Verlag
Bristol: IOP Publishing
Erscheinungsjahr
2010
Quelle
Alma/SFX Local Collection
Beschreibungen/Notizen
This article reviews a variety of methods to obtain the electron temperature and density by the emission line ratios for low-temperature plasmas containing argon or nitrogen gas. Based on the collisional–radiative model of excited particles, the underlying principle of each of these methods is described, along with the criterion on how to select an appropriate line-ratio method according to the discharge conditions. Limitations on the application of each line-ratio technique are also discussed.