Details

Autor(en) / Beteiligte

• Rudenko, K V
• Miakonkih, A V
• Rogojin, A E
• Bogdanov, S V
• Sidorov, V G
• Zelenkov, P V

Titel

Planar betavoltaic converter creation with plasma-immersion ion implantation process

Ist Teil von

• IOP conference series. Materials Science and Engineering, 2016-04, Vol.122 (1), p.12029-12032, Article 012029

Ort / Verlag

Bristol: IOP Publishing

Erscheinungsjahr

2016

Quelle

EZB Electronic Journals Library

Beschreibungen/Notizen

• Some results on planar diode structure creation by the method of a plasma-immersion ion implantation is presented in this paper. Obtained leakage current ~ 1 uA/cm2 at reverse voltage -1 V.