Details

Autor(en) / Beteiligte

• Turner, P.J
• Garcia, B
• Yantchev, V
• Dyer, G
• Yandrapalli, S
• Villanueva, L.G
• Hammond, R.B
• Plessky, V

Titel

5 GHz Band n79 wideband microacoustic filter using thin lithium niobate membrane

Ist Teil von

• Electronics letters, 2019-08, Vol.55 (17), p.942-944

Ort / Verlag

The Institution of Engineering and Technology

Erscheinungsjahr

2019

Quelle

Wiley Online Library All Journals

Beschreibungen/Notizen

• Microacoustic resonators made on suspended continuous membranes of LiNbO3 were recently shown to have very strong coupling and low losses at ≥5 GHz, suitable for high-performance filter design. Employing these simple resonator structures, the authors have designed, fabricated, and measured a 4.7 GHz bandpass ladder-type filter having 1 dB mid-band loss and 600 MHz bandwidth to address the 5G Band n79 requirements. The filter is fabricated on a monolithic substrate using standard i-line optical lithography and standard semiconductor processing methods for membrane release, starting with commercially available ion-sliced wafers having 400 nm thickness crystalline LiNbO3 layers. The filter is well-matched to a 50 Ω network and does not require external matching elements. Through accurate resonator engineering using our finite element method software filter design environment, the passband is spurious-free, and the filter provides better-than 30 dB rejection to the adjacent WiFi frequencies. This filter demonstrates the performance and scalable technology required for high-volume manufacturing of microacoustic filters >3.5 GHz.