Details

Autor(en) / Beteiligte

• Leong, A.Y.K.
• Turner, T.E.

Titel

The influence of temperature gradients in isothermal electromigration tests

Ist Teil von

• 2001 IEEE International Integrated Reliability Workshop. Final Report (Cat. No.01TH8580), 2001, p.91-93

Ort / Verlag

IEEE

Erscheinungsjahr

2001

Quelle

IEEE Electronic Library (IEL)

Beschreibungen/Notizen

• Temperature gradients exist at the ends of metal lines subjected to highly accelerated electromigration tests (e.g. Isothermal Test). These temperature gradients introduce a flux divergence that will impact the time to failure of a metal line. The impacts of such gradients are not modeled in Black‘s equation. Thus the failure to consider these effects will lead to incorrect analysis of highly accelerated test results. This paper will show data which clearly illustrates the impact of temperature gradients during the Isothermal test.