2022 Conference on Lasers and Electro-Optics (CLEO), 2022, p.1-2
2022
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Details
- Autor(en) / Beteiligte
- Titel
- Direct Laser Lithography: Single-Tool Patterning for Nonlinear Integrated Quantum Optics
- Ist Teil von
- 2022 Conference on Lasers and Electro-Optics (CLEO), 2022, p.1-2
- Ort / Verlag
- OSA
- Erscheinungsjahr
- 2022
- Quelle
- IEEE Xplore
- Beschreibungen/Notizen
- We present direct laser lithographic patterning of low-loss waveguides, periodic poling structures for single photon generation, electro-optical modulators and superconducting detectors based on WSi, for integrated quantum circuits in titanium in-diffused lithium niobate.
- Sprache
- Englisch
- Identifikatoren
- Titel-ID: cdi_ieee_primary_9891289
- Format
- –
- Schlagworte
- Electro-optic modulators, Lithium niobate, Lithography, Quantum circuit, Quantum optics, Titanium, Waveguide lasers