2022 Conference on Lasers and Electro-Optics (CLEO), 2022, p.1-2
2022
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Details
- Autor(en) / Beteiligte
- Titel
- Silicon Nitride Process for Mode-Orthogonal MEMS-Tunable Photonic Devices
- Ist Teil von
- 2022 Conference on Lasers and Electro-Optics (CLEO), 2022, p.1-2
- Ort / Verlag
- OSA
- Erscheinungsjahr
- 2022
- Quelle
- IEEE Electronic Library Online
- Beschreibungen/Notizen
- We report a silicon-photonics process for MEMS-tunable phase shifters that leverages orthogonal optical modes. A phase shifter with -0.63dB insertion loss and π phase shift and a preliminary tunable directional coupler are demonstrated.
- Sprache
- Englisch
- Identifikatoren
- Titel-ID: cdi_ieee_primary_9891235
- Format
- –
- Schlagworte
- Directional couplers, Electrooptical waveguides, Insertion loss, Laser modes, Optical coupling, Optical losses, Silicon nitride