Details

Autor(en) / Beteiligte

• Lu, Ruochen
• Yang, Yansong
• Gong, Songbin

Titel

Acoustic Loss in Thin-Film Lithium Niobate: An Experimental Study

Ist Teil von

• Journal of microelectromechanical systems, 2021-08, Vol.30 (4), p.632-641

Ort / Verlag

New York: IEEE

Erscheinungsjahr

2021

Quelle

IEEE Xplore

Beschreibungen/Notizen

• This work reports an experimental study of acoustic loss in thin-film lithium niobate (LiNbO 3 ) using acoustic delay lines (ADLs). Unlike prior resonator-based quality factor (<inline-formula> <tex-math notation="LaTeX">Q </tex-math></inline-formula>) studies, this approach directly extracts the damping in thin-film LiNbO 3 , avoiding the influence of other intricate loss mechanisms, e.g., anchor loss and electrode-induced loss. Acoustic attenuation of fundamental symmetric (S0) and shear horizontal (SH0) waves are studied in suspended LiNbO 3 thin films of different thicknesses. The attenuation is significantly higher in thinner LiNbO 3 films, suggesting the LiNbO 3 crystal degradation during the microfabrication as the primary loss origin. Nevertheless, the extracted equivalent <inline-formula> <tex-math notation="LaTeX">Q </tex-math></inline-formula> in thin-film LiNbO 3 is still higher than reported values, suggesting that anchor design and electrode quality remain the bottlenecks for higher <inline-formula> <tex-math notation="LaTeX">Q </tex-math></inline-formula>. The proposed loss extraction framework is readily extendable to other acoustic thin-film structures. [2021-0107]