Details

Autor(en) / Beteiligte

• Graebner, J.E.
• Safar, H.F.
• Barber, B.
• Gammel, P.L.
• Herbsommer, G.J.
• Fetter, L.A.
• Pastalan, J.
• Huggins, H.A.
• Miller, R.E.

Titel

Optical mapping of surface vibrations on a thin-film resonator near 2 GHz

Ist Teil von

• 2000 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.00CH37121), 2000, Vol.1, p.635-638 vol.1

Ort / Verlag

IEEE

Erscheinungsjahr

2000

Link zum Volltext

• IEEE_Xplore

Quelle

IEEE Xplore Digital Library

Beschreibungen/Notizen

• An optical scanning interferometer is used to examine the mode structure of a solidly-mounted thin-film resonator (TFR) when it is excited electrically in the neighborhood of its resonant frequency. Scans across the surface with <1 /spl mu/m lateral resolution and 0.3 pm (0.003 Angstrom) vertical resolution reveal a rich spectrum of modes. At the mechanical resonance a uniform up-and-down motion is observed, while at slightly higher frequencies near the pole frequency the mode pattern breaks up into standing waves with wavelengths ranging from 10-100 /spl mu/m. A second set of standing waves with discrete wavelengths in the range 2-5 /spl mu/m and with random orientation is observed over a broader frequency range. Semi-quantitative agreement is found between the data and the dispersion curves calculated with a transfer matrix technique for the multilayer waveguide structure of the TFR.