Details

Autor(en) / Beteiligte

• Tan, Siew Li
• Yap, Yong Keong
• Wong, Jia Jun
• Prakash, Saurav
• Grenci, Gianluca
• Danner, Aaron J.

Titel

Scalable High Pulsed Power VCSEL Arrays With Transparent Top Electrodes

Ist Teil von

• IEEE photonics technology letters, 2020-08, Vol.32 (15), p.929-932

Ort / Verlag

New York: IEEE

Erscheinungsjahr

2020

Quelle

IEEE Electronic Library (IEL)

Beschreibungen/Notizen

• We demonstrate an innovative approach to fabricating scalable VCSEL arrays for high-pulsed-power applications. The VCSEL arrays consist of tightly-packed, small-diameter mesas that are planarized and passivated with SU-8 resin, and connected by a large-area top transparent electrode made of indium tin oxide. Peak pulsed output power exceeding 100 kW/cm 2 of active area was achieved in arrays with very smoothly etched and passivated sidewalls, without the need of oxide aperture formation.