Details

Autor(en) / Beteiligte

• De Paoli, Greta
• Jantzen, Senta L.
• Bucio, Thalia Dominguez
• Skandalos, Ilias
• Holmes, Christopher
• Smith, Peter G. R.
• Milosevic, Milan M.
• Gardes, Frederic Y.

Titel

Post Fabrication Permanent Laser Trimming of Silicon Nitride Photonic Devices

Ist Teil von

• 2019 IEEE 2nd British and Irish Conference on Optics and Photonics (BICOP), 2019, p.1-3

Ort / Verlag

IEEE

Erscheinungsjahr

2019

Quelle

IEEE/IET Electronic Library (IEL)

Beschreibungen/Notizen

• We demonstrated the possibility of trimming the operating wavelength of nitrogen-rich silicon nitride racetrack resonators by exposing the devices to an ultraviolet laser. The results revealed that in a few seconds only, the resonant wavelength of fabricated devices could be tuned to any point within a free spectral range. This technique can also be applied to trim the response of any other silicon photonic device based on nitrogen-rich silicon nitride.