Details

Autor(en) / Beteiligte

• Pan, Yen-Lin
• Liu, Wen-Chau

Titel

Study of a Platinum (Pt) Nanoparticle (NP)/Vanadium Pentoxide (V₂O₅) Thin Film-Based Ammonia Gas Sensor

Ist Teil von

• IEEE transactions on electron devices, 2020-05, Vol.67 (5), p.1-7

Ort / Verlag

New York: IEEE

Erscheinungsjahr

2020

Quelle

IEEE Xplore

Beschreibungen/Notizen

• A new and interesting ammonia (NH₃) gas sensor, based on incorporating a radio frequency (RF) sputtered vanadium pentoxide (V₂O₅) thin film and thermal evaporated platinum (Pt) nanoparticles (NPs), is fabricated and studied herein. The studied Pt NP/V₂O₅ device demonstrates abnormal p-type conductive behavior, presumably caused by the presence of an inversion (hole) layer on the surface of the n-type V₂O₅ thin film. The employment of Pt NPs effectively enhances the specific surface area, catalytic activity, and related ammonia sensing properties. Experimentally, a high sensing response ratio for SR of 83.2% under 1000 ppm NH₃/air gas and a very low detecting level of 100 ppb NH₃/air with a relatively fast sensing speed are obtained at the optimum temperature of 300 °C. The studied device also shows the advantages of a simple structure, good selectivity, easy fabrication, and stable and reversible sensing performance. Therefore, the studied Pt NP/V₂O₅ thin film structure provides potential for high-performance ammonia sensing applications.