Details

Autor(en) / Beteiligte

• Matsuda, Ryosuke
• Mizuguchi, Satoru
• Nakamura, Fumika
• Endo, Takuma
• Inamori, Go
• Isoda, Yutaka
• Ota, Hiroki

Titel

Stretchable Array of Resistive Pressure Sensors Ignoring the Effect of Strain-Induced Deformation

Ist Teil von

• 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS), 2020, p.803-805

Ort / Verlag

IEEE

Erscheinungsjahr

2020

Quelle

IEEE Electronic Library Online

Beschreibungen/Notizen

• In this study, a stretchable array of resistive pressure sensors which could ignore the effect of stretch deformation was demonstrated. In terms of stretchable pressure sensors composed of elastic materials, pressure sensors itself are deformed during strain of the devices, which becomes large error of the pressure measurement. Our resistive sensors in a array are based on patterned porous conductive silicone (Ecoflex). The substrate consists of hetero-silicone rubbers of two different elastic silicones. In addition, resistances of column and row electrodes in the matrix of mapping are much lower than the pressure sensors. This substrate and control of electrode resistances can prevent stretch deformation of the device from affecting the sensing of pressure. The error of the pressure sensor in our device during 150% strain was one sixth less than the one by conventional elastic pressure sensor composed of organic materials. This result suggests possibility to apply stretchable pressure sensor on largely deformed area of body, and soft robots.