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Details

Autor(en) / Beteiligte
Titel
Wave-Guided Lateral-Configured Ge-Ge-Si Photodetectors Obtained by Rapid Melting Growth Technique
Ist Teil von
  • IEEE photonics technology letters, 2020-02, Vol.32 (3), p.174-177
Ort / Verlag
IEEE
Erscheinungsjahr
2020
Link zum Volltext
Quelle
IEEE Xplore
Beschreibungen/Notizen
  • The synergy of photonic and electronic signal transmission in the near-infrared spectrum is an ideal solution for optoelectronic integrated circuits in high-speed communication systems. In this study, we fabricated high-quality germanium mesa on Si by rapid-melting growth technique for a PIN photodetector. The quality of Ge was investigated through standard Raman spectroscopy and electronic microscopy. Rather than a single-crystalline Ge mesa, a polycrystalline structure differs from those of our previous reports, and may be caused by the multiple vicinities with oxide and Si. Ge/Ge/Si PIN photodetector and a Si waveguide was fabricated and measured to study the photodetector's I-V characteristics at near-infrared spectrum. The normalized power-dependent current enhancement and photoresponsivity were investigated to reveal the effect of Ge mesa quality. This study demonstrated that a high-quality Ge mesa can be employed for optoelectronic integrated circuit with high photoelectric conversion efficiency and responsivity by a Si-based integrated circuit fabrication process.
Sprache
Englisch
Identifikatoren
ISSN: 1041-1135
eISSN: 1941-0174
DOI: 10.1109/LPT.2020.2964844
Titel-ID: cdi_ieee_primary_8952602

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