IEEE journal of quantum electronics, 2020-02, Vol.56 (1), p.1-9
2020
Details
- Autor(en) / Beteiligte
- Titel
- Comprehensive Study on Chip-Integrated Germanium Pin Photodetectors for Energy-Efficient Silicon Interconnects
- Ist Teil von
- IEEE journal of quantum electronics, 2020-02, Vol.56 (1), p.1-9
- Ort / Verlag
- New York: IEEE
- Erscheinungsjahr
- 2020
- Link zum Volltext
- Quelle
- IEEE Electronic Library Online
- Beschreibungen/Notizen
- Optical interconnects are promising alternatives to copper-based wirings in on-chip communications. Recent advances in integrated group-IV nanophotonics should address a range of challenges related with speed, energy consumption, and cost. Monolithically integrated germanium pin photodetectors on silicon-on-insulator (SOI) waveguides are indispensable devices in this buoyant research field. Here, we comprehensively investigate the opto-electrical properties of hetero-structured pin photodetectors. All photodetectors were fabricated on top of 200-mm SOI substrates using industrial-scale semiconductor manufacturing processes. Under a low-bias voltage supply of 1 V, pin photodetectors exhibit dark-currents from 5 nA to 100 nA, dark current densities from 0.404 A/cm 2 to 0.808 A/cm 2 , responsivities in a range of 0.17 A/W to 1.16 A/W, and cut-off frequencies from 7 GHz to 35 GHz, respectively. Such achievements make them promising for use in power-efficient optical links operating at 40 Gbps, with a device energy dissipation of only few fJ per bit.
- Sprache
- Englisch
- Identifikatoren
- ISSN: 0018-9197eISSN: 1558-1713DOI: 10.1109/JQE.2019.2954355Titel-ID: cdi_ieee_primary_8906117
- Format
- –
- Schlagworte
- Alternative energy sources, Complementary metal-oxide-semiconductor technology, Dark current, Detectors, Electrical properties, Energy consumption, Energy dissipation, Energy management, Engineering Sciences, Germanium, germanium photodetectors, inter- and intra-chip interconnects, Micro and nanotechnologies, Microelectronics, optical communications, Optical device fabrication, Optical interconnects, Optical waveguides, Optics, Photodetectors, Photometers, Photonic, Pins, Power management, Semiconductors, Silicon, silicon nanophotonics, Substrates, Waveguides