Details

Autor(en) / Beteiligte

• Wen-qiang Zhao
• Yan An
• Jiu-ling Liu
• Ming-hua Liu
• Shi-tang He

Titel

Effect of Annealing Temperatures on Electrode Surface Roughness and Sensitivity of the Saw Detectors In Saw Gcs

Ist Teil von

• 2019 13th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA), 2019, p.1-4

Ort / Verlag

IEEE

Erscheinungsjahr

2019

Quelle

IEEE Xplore

Beschreibungen/Notizen

• In this paper, the effect of annealing temperatures on electrode surface roughness and on sensitivity of the SAW detectors in SAW GCS(surface acoustic wave gas Chromatography system) were studied. The electrode surface roughness of the surface acoustic wave (SAW) detector was changed by annealing at different temperatures. The annealing temperatures of 25°C, 200°C and 300°C were chosen for the experiment, and we got that 200°C had the largest electrode roughness. Finally, the SAW detectors obtained at different above mentioned annealing temperatures were used in SAW GC system to detect dimethyl methylphosphonate (DMMP). The responses have shown that with the increase of annealing temperature, the sensitivity improved obviously for DMMP.