Details

Autor(en) / Beteiligte

• Capoccia, Giovanni
• Sardi, Giovanni Maria
• Marcelli, Romolo
• Proietti, Emanuela

Titel

Near field microwave microscopy for MEMS and micro-electronic device characterization

Ist Teil von

• 2018 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), 2018, p.1-4

Ort / Verlag

IEEE

Erscheinungsjahr

2018

Quelle

IEEE Electronic Library Online

Beschreibungen/Notizen

• In this work, an electromagnetic technique for imaging and spectroscopy of materials and devices, suitable for the characterization of MEMS and microelectronics configurations as a function of frequency in the microwave range, will be presented. In particular, near field measurements will be shown for the evaluation of dielectric properties of the materials and for imaging of RF devices. Perspective utilization in the evaluation of quantities having specific interest for the microelectronics and MEMS industries will be discussed, with reference to properties that can be deduced from the measured surface impedance, like the morphology and the frequency dependence of the material properties.