Details

Autor(en) / Beteiligte

• Marcelli, Romolo
• Lucibello, Andrea
• Capoccia, Giovanni
• Proietti, Emanuela
• Sardi, Giovanni Maria
• Christopher, Hardly Joseph
• Michalas, Loukas
• Bartolucci, Giancarlo
• Kienberger, Ferry
• Gramse, Georg
• Kasper, Manuel

Titel

Near-field microwave techniques for micro- and nano-scale characterization in materials science

Ist Teil von

• 2017 International Semiconductor Conference (CAS), 2017, p.29-36

Ort / Verlag

IEEE

Erscheinungsjahr

2017

Quelle

IEEE Electronic Library (IEL)

Beschreibungen/Notizen

• In this paper, the basic principles of Near-Field Microscopy will be reviewed with focus on the micro- and nano-scale resolution configurations for material science measurements. Results on doping profile, dielectric and magnetic properties will be presented, with details on the calibration protocols needed for quantitative estimation of the dielectric constant and of the permeability.