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Influence of coupling between Rayleigh and SH SAWs on rotated Y-cut LiNbO3 to their electromechanical coupling factor
Ist Teil von
2017 IEEE International Ultrasonics Symposium (IUS), 2017, p.1-1
Ort / Verlag
IEEE
Erscheinungsjahr
2017
Quelle
IEEE Xplore
Beschreibungen/Notizen
Suppression of the SH-SAW response is mandatory to design TC SAW devices on θ degree rotated Y-cut LiNbO 3 . However, it is not easy because K 2 for SH SAW changes rapidly with θ, and its optimal value in terms of the SH-SAW suppression is dependent on electrode and SiO 2 thicknesses. The authors found that the optimal θ always locates close to θ where difference in velocities of two SAWs is minimum. This suggested that their coupling is responsible for variation of their K 2 .