Details

Autor(en) / Beteiligte

• Xinyi Li
• Jingfu Bao
• Yulin Huang
• Benfeng Zhang
• Gongbin Tang
• Omori, Tatsuya
• Hashimoto, Ken-ya

Titel

Use of double-raised-border structure for quality factor enhancement of type II piston mode FBAR

Ist Teil von

• 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS), 2017, p.547-550

Ort / Verlag

IEEE

Erscheinungsjahr

2017

Quelle

IEEE Electronic Library (IEL)【Remote access available】

Beschreibungen/Notizen

• This paper investigates applicability of double raised borders to the piston mode film bulk acoustic resonator (FBAR). It is shown that it offers significant improvement of the quality factor at the antiresonance without sacrificing the spurious level when the structure is designed appropriately. This enhancement is attributed to the reduction of the mode-conversion and the increase of the reflection coefficient at the border region.