Details

Autor(en) / Beteiligte

• Selbmann, Franz
• Baum, Mario
• Wiemer, Maik
• Gessner, Thomas

Titel

Deposition of Parylene C and characterization of its hermeticity for the encapsulation of MEMS and medical devices

Ist Teil von

• 2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2016, p.427-432

Ort / Verlag

IEEE

Erscheinungsjahr

2016

Quelle

IEEE Xplore

Beschreibungen/Notizen

• Following the recent trend of miniaturization of MEMS and the approach to improve the comfort of medical implants for patients by reducing their size the polymer Parylene is a promising candidate for encapsulation issues. Parylene combines a number of excellent properties like biocompatibility/biostability, chemical inertness, transparency and low water permeability. Within the presented work the deposition characteristics and properties like conformity, permeability of water vapor, etc. are examined.